UTpure™
High Purity
The development of innovative technology and the spirit of relentless effort are the beliefs of Boilepak O-ring. Cleanliness is the key to technological breakthroughs in advanced processes and market competitiveness.
Boilpeak high-purity materials use patented polymerization technology, significantly improving the cleanliness of the product itself, and the manufacturing process does not require the addition of extra fillers. As a result, it ensures optimal cleanliness performance in most plasma environments, greatly improving process yield.
Additional fillers
Excellent physical properties without theneed for additional fillers
Global Compatibility
The products developed by Boilpeak are selected based on the continuously growing popularity of existing models.
Sealing Technology
Leading advanced processes to achieve next-generation nano high-purity sealing technology
Process Application
BOILPEAK has over 15 years of outstanding manufacturing experience, continuously developing and innovating in line with the times. In the face of demanding process conditions, we are committed to providing various solutions, continuously developing new specialty elastomer materials, and simultaneously offering the best sealing solutions.
Thin Film Process
The thin film process can be divided into two deposition methods: CVD (Chemical Vapor Deposition) and PVD (Physical Vapor Deposition). Both deposition methods pose different challenges for sealing applications in the process.
Etching Process
The etching process environment is categorized into Dry Etching and Wet Etching. The primary use of high-intensity plasma and various chemicals in the etching process poses different challenges for sealing applications.
Diffusion Process
The diffusion process can be divided into Ion Implantation and Diffusion. The primary use of extremely high temperatures and various chemicals in the diffusion process poses different challenges for sealing applications.
High-purity product range
BOILPEAK extensively innovates O-rings and related products, working with customers to identify excellent combinations for industrial applications from China.
UTpure™ KS291
Product Features:
Good tolerance in O and F plasma environments
Excellent gas corrosion resistance in dry etching processes
Outstanding high-temperature resistance with very low outgassing rate
Excellent rebound and compression set performance
Product Applications:
Gas inlet and outlet sealing rings
Chamber cover sealing rings
Shut-off valve sealing rings
ATE valve and slit valve door seals
Product Processes:Etch、Tiff、CVD
UTpure™ KS235
Product Features:
Excellent plasma resistance
Outstanding high-temperature resistance
Extremely low outgassing rate
Excellent mechanical properties for dynamic and static sealing applications
Excellent ozone resistance
Product Applications:
Gas inlet and outlet sealing rings
Chamber cover sealing rings
Shut-off valve sealing rings
ATE valve and slit valve door seals
Product Processes:Etch、Tiff、CVD
UTpure™ KS732
Product Features:
Excellent resistance to F plasma
Good gas corrosion resistance in dry etching processes
Outstanding high-temperature resistance
Very low outgassing rate
Excellent rebound and compression set performance
Product Applications:
Bracket sealing washers
Filter sealing rings
Gate valve sealing rings
Isolation valve sealing rings
Product Processes:Etch、Tiff、CVD
UTpure™ KS130
Product Features:
Extremely high cleanliness with low contaminants
Excellent compression set performance
Very low metal ion content
Excellent performance in dry etching processes
Product Applications:
Gas inlet and outlet sealing rings
Transmission pipeline sealing rings
Bonded door panel sealing rings
Static sealing in low-seal, low-pressure applications
Product Processes:Etch、CVD
UTpure™ KS291
Product Features:
Extremely high purity with minimal contamination
Excellent resistance to O plasma erosion
Low gas corrosion weight loss
Outstanding compression set and rebound performance
Product Applications:
Chamber reaction room sealing rings
Observation window sealing rings
Gas inlet and outlet sealing rings
Clamp center bracket sealing rings
Product Processes:Etch、Pumpline
UTpure™ KS291
Product Features:
Extremely low metal ion content
Excellent resistance to chemical gases
Outstanding physical and mechanical properties
Excellent processing performance
Product Applications:
High-pressure chamber cover sealing rings
Pendulum valve sealing rings
Distributor sealing rings
Clamp center bracket sealing rings
Product Processes:Etch、Pumpline