Product Center
Fluororubber series
The development of innovative technology and the relentless spirit of effort are the core beliefs of Boilpeak O-ring. Cleanliness is the key to technological breakthroughs in advanced processes and market competitiveness.
Boilpeak’s high-purity materials use patented fluorination polymerization technology, significantly enhancing the product’s cleanliness. Additionally, the manufacturing process does not require the addition of extra fillers. This ensures that the product exhibits optimal cleanliness in most plasma environments, greatly improving process yield.
Perfluoro product series
FFKMO-RING - KS
Product Features:
Good resistance in O and F plasma environments
Excellent gas corrosion resistance in dry etching processes
Outstanding high-temperature performance with very low outgassing rate
Excellent rebound and compressive deformation properties
Product Applications:
Gas inlet and outlet sealing rings
Chamber lid sealing rings
Stop valve sealing rings
Gate valve and slit valve seat sealing
Product Processes:Etch、Tiff、CVD、PVD、Stripping
FFKMO-RING - KR
Product Features:
Good plasma resistance
Excellent high-temperature performance
Extremely low outgassing rate
Excellent mechanical properties for dynamic and static sealing
Outstanding ozone resistance
Product Applications:
Gas inlet and outlet sealing rings
Chamber lid sealing rings
Stop valve sealing rings
Gate valve and slit valve seat sealing
Product Processes:Etch、Etch、Rinsing 、Cmp、Pumpline
FFKMO-RING - KH
Product Features:
Excellent resistance to F plasma
Good gas corrosion resistance in dry etching processes
Outstanding high-temperature performance
Very low outgassing rate
Excellent rebound and compressive deformation properties
Product Applications:
Bracket sealing gaskets
Filter sealing rings
Gate valve sealing rings
Isolation valve sealing rings
Product Processes:Oxidation、Tiff、CVD、ALD、Ashing