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Fluorosilicone Series

The development of innovative technology and the relentless spirit of perseverance are the core beliefs of Boilpeak O-rings. Cleanliness is the key to technological breakthroughs in advanced processes and market competition.

Boilpeak’s high-purity materials use patented fluoropolymer technology, significantly enhancing the product’s cleanliness. The manufacturing process does not require additional fillers, ensuring optimal cleanliness characteristics in most plasma environments, which greatly improves process yield.

Fluorosilicone Product Series

Fluorosilicon seal ring

Product Features:

Maintains stability in extreme chemical environments, high-temperature resistance, excellent wear resistance, and vacuum resistance.

Fluorosilicone also has good electrical properties, outstanding compression set, and heat resistance.

Product Applications:

Gas inlet and outlet seal rings

Chamber lid seal rings

Shut-off valve seal rings

ATE valve and slit valve door seals

Product Processes:Etch, PVD, CVD, Oxidation, Deposition

Fluorosilicon seal ring

Product Features:

Maintains stability in extreme chemical environments, high-temperature resistance, excellent wear resistance, and vacuum resistance.

Fluorosilicone also has good electrical properties, outstanding compression set, and heat resistance.

Product Applications:

Gas inlet and outlet seal rings

Chamber lid seal rings

Shut-off valve seal rings

ATE valve and slit valve door seals

Product Processes:Etch, PVD, CVD, Oxidation, Deposition

FFKMO-RING - KH

Product Features:

Maintains stability in extreme chemical environments, high-temperature resistance, excellent wear resistance, and vacuum resistance.

Fluorosilicone also has good electrical properties, outstanding compression set, and heat resistance.

Product Applications:

Gas inlet and outlet seal rings

Chamber lid seal rings

Shut-off valve seal rings

ATE valve and slit valve door seals

Product Processes:Etch, PVD, CVD, Oxidation, Deposition

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